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JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 16, no. 12, page. 2593 - 2597, 2006-12
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 22, no. 12, 2012-12
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JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 20, no. 8, page. 85034, 2010-08
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 20, no. 2, page. 25028, 2010-02
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