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JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 13, no. 5, page. 523 - 531, 2003-09

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JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 16, no. 5, page. 1067 - 1072, 2006-05

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JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 25, no. 9, 2015-09

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JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 17, no. 3, page. 501 - 508, 2007-03

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JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 17, no. 1, page. 147 - 153, 2007-01

Article

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 16, no. 12, page. 2593 - 2597, 2006-12

Article

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 22, no. 12, 2012-12

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