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Determining Golden Process Routes in Semiconductor Manufacturing Process for Yield Management

Title
Determining Golden Process Routes in Semiconductor Manufacturing Process for Yield Management
Authors
Lee, Chang-HoBae, Young-MokLee, Dong-HeeKim, Kwang-Jae
Date Issued
2017-12-10
Publisher
IEEE
URI
https://oasis.postech.ac.kr/handle/2014.oak/41661
Article Type
Conference
Citation
The 2017 International Conference on Industrial Engineering and Engineering Management, 2017-12-10
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김광재KIM, KWANG JAE
Dept. of Industrial & Management Eng.
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