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Department of Electrical Engineering (전자전기공학과)
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Item hits:
Conference
Fabrication of P-channel MOS TFT's on rapid thermal CVD polycrystalline silicon-germanium films
, 1996-01
LEE, SK
;
KIM, HG
;
CHUNG, WJ
;
KANG, BK
;
KIM, O
;
강봉구
Conference
Low temperature (<=550 degrees C) fabrication of CMOS TFT's on rapid-thermal CVD polycrystalline silicon-germanium films
, 1997-01
LEE, SK
;
CHOE, SM
;
AHN, CG
;
CHUNG, WJ
;
KWON, YK
;
KANG, BK
;
KIM, O
;
강봉구
1
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Subject
polycrystalline silicon germanium
2
TFT
2
ALLOYS
1
CMOS TFT
1
ECR plasma hydrogenation
1
low temperature
1
OPTICAL-PROPERTIES
1
TEMPERATURE
1
TRANSISTORS
1
Date issued
1997
1
1996
1
Type
Conference
2
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