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Reducing Line Edge Roughness of PS-b-PMMA pattern using hydrogen bonding located at the interface of the microdomains
- Title
- Reducing Line Edge Roughness of PS-b-PMMA pattern using hydrogen bonding located at the interface of the microdomains
- Authors
- LEE, KYU SEONG; KIM, JIN KON
- Date Issued
- 2016-04-06
- Publisher
- 한국고분자학회
- Article Type
- Conference
- Citation
- 한국고분자학회 2016년 춘계학술발표회, 2016-04-06
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Related Researcher
- 김진곤KIM, JIN KON
- Dept. of Chemical Enginrg