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Electrical Characteristics of Parylene Gate Dielectric in Silicon Nanowire Based Ion-Sensitive Field-Effect Transistors
- Title
- Electrical Characteristics of Parylene Gate Dielectric in Silicon Nanowire Based Ion-Sensitive Field-Effect Transistors
- Authors
- Lee, Jeong-Soo; Choi, Wonyeong; Jin, Bo; Park, Chanoh; Kim, Donghoon; Lee, Ga-Yoon; Pyun, Jae-Chul
- Date Issued
- 2018-02-06
- Publisher
- KCS
- Article Type
- Conference
- Citation
- 제25회 한국반도체학술대회 (KCS 2018), 2018-02-06
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Related Researcher
- 이정수LEE, JEONG SOO
- Dept of Electrical Enginrg