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초정밀 전자빔 리소그래피 오버레이 기반 3차원 메타물질 구현

Title
초정밀 전자빔 리소그래피 오버레이 기반 3차원 메타물질 구현
Authors
RHO, JUNSUK
Date Issued
2017-11-01
Publisher
대한기계학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/42768
Article Type
Conference
Citation
대한기계학회 추계 학술대회, 2017-11-01
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노준석RHO, JUNSUK
Dept of Mechanical Enginrg
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