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3D metamaterials and metadevices by ultra-accurate and precise electron beam lithography overlay
- Title
- 3D metamaterials and metadevices by ultra-accurate and precise electron beam lithography overlay
- Authors
- RHO, JUNSUK; KIM, INKI; YOON, GWANHO; SO, SUNAE; MUN, JUNGHO; KIM, MINKYUNG
- Date Issued
- 2017-05-26
- Publisher
- SPP
- Article Type
- Conference
- Citation
- the 8th International Conference on Surface Plasmon Photonics (SPP8), 2017-05-26
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Related Researcher
- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg