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Fabrication of deep sub-wavelength 3D metamaterials and metadevices using high-accuracy electron beam lithography overlay
- Title
- Fabrication of deep sub-wavelength 3D metamaterials and metadevices using high-accuracy electron beam lithography overlay
- Authors
- RHO, JUNSUK; KIM, INKI; YOON, GWANHO; SO, SUNAE; MUN, JUNGHO; KIM, MINKYUNG
- Date Issued
- 2017-02-15
- Publisher
- 초정밀광기계기술연구센터
- Article Type
- Conference
- Citation
- nano-IMP 2017, 2017-02-15
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Related Researcher
- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg