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Helical Resonator 고밀도 SF6 플라즈마에 의한 텅스텐 식각 특성
- Title
- Helical Resonator 고밀도 SF6 플라즈마에 의한 텅스텐 식각 특성
- Authors
- 정지윤
- Date Issued
- 1997
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899101
https://oasis.postech.ac.kr/handle/2014.oak/4329
- Article Type
- Thesis
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