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Effects of Impurity Controlled Mo Under-layer on Reliability of Cu interconnector for TFT-LCD
- Title
- Effects of Impurity Controlled Mo Under-layer on Reliability of Cu interconnector for TFT-LCD
- Date Issued
- 2009-11-30
- Publisher
- MRS fall meeting
- Article Type
- Conference
- Citation
- MRS fall meeting, 2009-11-30
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg