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Direct synthesis of silicon nanocrystals on the gas phase using non thermal plasma and effect of the nitrogen plasma on optical property of the silicon nanocrytals structures

Title
Direct synthesis of silicon nanocrystals on the gas phase using non thermal plasma and effect of the nitrogen plasma on optical property of the silicon nanocrytals structures
Authors
박찬경장동현구길호
Date Issued
2009-10-22
Publisher
대한재료금속학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/43910
Article Type
Conference
Citation
대한재료금속학회 추계학술대회, 2009-10-22
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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