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Tetramethylethylenediamine Alane(TMEDAA)을 이용한 알루미늄 박막의 유기 금속 화학 증착
- Title
- Tetramethylethylenediamine Alane(TMEDAA)을 이용한 알루미늄 박막의 유기 금속 화학 증착
- Authors
- 김대환
- Date Issued
- 1998
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899281
https://oasis.postech.ac.kr/handle/2014.oak/4509
- Article Type
- Thesis
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