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dc.contributor.author김광재-
dc.contributor.author김현진-
dc.contributor.author곽도순-
dc.date.accessioned2018-05-22T16:20:45Z-
dc.date.available2018-05-22T16:20:45Z-
dc.date.created2010-05-05-
dc.date.issued2009-10-11-
dc.identifier.urihttps://oasis.postech.ac.kr/handle/2014.oak/45635-
dc.publisherINFORMS-
dc.relation.isPartOfINFORMS Annual Meeting-
dc.titleAchieving Low Within-wafer Variability in Semi-conductor Manufacturing Process-
dc.typeConference-
dc.type.rimsCONF-
dc.identifier.bibliographicCitationINFORMS Annual Meeting-
dc.citation.titleINFORMS Annual Meeting-
dc.contributor.affiliatedAuthor김광재-
dc.contributor.affiliatedAuthor김현진-
dc.contributor.affiliatedAuthor곽도순-
dc.description.journalClass1-
dc.description.journalClass1-

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김광재KIM, KWANG JAE
Dept. of Industrial & Management Eng.
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