DC and Reliability Characteristics of 45 nm Node MOSFETs With Using HfSiON/TiN Gate Stacks
- Title
- DC and Reliability Characteristics of 45 nm Node MOSFETs With Using HfSiON/TiN Gate Stacks
- Authors
- 정윤하
- Date Issued
- 2009-02-18
- Publisher
- Korean Conference on Semiconductors
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/46287
- Article Type
- Conference
- Citation
- 16th Korean Conference on Semiconductors, 2009-02-18
- Files in This Item:
- There are no files associated with this item.
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