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DC and Reliability Characteristics of 45 nm Node MOSFETs With Using HfSiON/TiN Gate Stacks

Title
DC and Reliability Characteristics of 45 nm Node MOSFETs With Using HfSiON/TiN Gate Stacks
Authors
정윤하
Date Issued
2009-02-18
Publisher
Korean Conference on Semiconductors
URI
https://oasis.postech.ac.kr/handle/2014.oak/46287
Article Type
Conference
Citation
16th Korean Conference on Semiconductors, 2009-02-18
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정윤하JEONG, YOON HA
Dept of Electrical Enginrg
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