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Test Structures for Accurate UHF C-V Measurements of Nano-Scale CMOSFETs with HfSiON and TiN Metal Gate
- Title
- Test Structures for Accurate UHF C-V Measurements of Nano-Scale CMOSFETs with HfSiON and TiN Metal Gate
- Authors
- 정윤하
- Date Issued
- 2007-03-19
- Publisher
- IEEE
- Article Type
- Conference
- Citation
- IEEE International Conference on Microelectronic Test Structures (ICMTS 2007), page. 124 - 127, 2007-03-19
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Related Researcher
- 정윤하JEONG, YOON HA
- Dept of Electrical Enginrg