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Nanoporous Low-k SiCOH Thin Films: Quantitative Analysis of Structure and Properties
- Title
- Nanoporous Low-k SiCOH Thin Films: Quantitative Analysis of Structure and Properties
- Authors
- 이문호; 김경태; 허규용; 박성규; 윤진환; 진경식; 진상우; 이택준; 박삼대; 김진철; 김동민; 정정운; 노예철; 안병철; 권원상; 김미희; 고용기; 정성민; 최준만; 이시우
- Date Issued
- 2009-11-30
- Publisher
- 4th Asia-Oceania Forum for Synchrotron Radiation Research
- Article Type
- Conference
- Citation
- 4th Asia-Oceania Forum for Synchrotron Radiation Research, 2009-11-30
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry