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Nanopore imprinting in spin-on dielectric polymers with star-shape six-armed porogens
- Title
- Nanopore imprinting in spin-on dielectric polymers with star-shape six-armed porogens
- Date Issued
- 2009-02-24
- Publisher
- The 2nd POSTECH/Kyushu university global-COE Joint Symposium on Polymers and Nanomaterials
- Article Type
- Conference
- Citation
- The 2nd POSTECH/Kyushu university global-COE Joint Symposium on Polymers and Nanomaterials, 2009-02-24
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