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고유한 비연성 2축 MEMS 자이로의 제작 방법

Title
고유한 비연성 2축 MEMS 자이로의 제작 방법
Authors
임근배김진영성중우안태창
Date Issued
2009-08-27
Publisher
2009 한국군사과학기술학회 종합학술대회
URI
https://oasis.postech.ac.kr/handle/2014.oak/46499
Article Type
Conference
Citation
2009 한국군사과학기술학회 종합학술대회, page. 134, 2009-08-27
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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