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테라헤르츠 엘립소메트리를 이용한 도핑된 실리콘의 전기적 광학적 물성 분석

Title
테라헤르츠 엘립소메트리를 이용한 도핑된 실리콘의 전기적 광학적 물성 분석
Authors
한해욱
Date Issued
2008-07-11
Publisher
OSK
URI
https://oasis.postech.ac.kr/handle/2014.oak/46635
Article Type
Conference
Citation
OSK 하계학술대회 2008, 2008-07-11
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한해욱HAN, HAEWOOK
Dept of Electrical Enginrg
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