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초음속 나노입자빔을 이용한 10nm 표면오염입자 제거 실험
- Title
- 초음속 나노입자빔을 이용한 10nm 표면오염입자 제거 실험
- Authors
- 이진원
- Date Issued
- 2011-02-16
- Publisher
- 한국반도체산업협회
- Article Type
- Conference
- Citation
- 한국반도체 학술대회, 2011-02-16
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Related Researcher
- 이진원LEE, JIN WON
- Dept of Mechanical Enginrg