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Development of an ECR hyperthermal neutral beam source for low temperature epitaxial growth of GaN
- Title
- Development of an ECR hyperthermal neutral beam source for low temperature epitaxial growth of GaN
- Authors
- 조무현
- Date Issued
- 2010-07-04
- Publisher
- The 10th Committee on Asia-Pacific Conference on Plasma Science and Technology, The 153rd Committee on Plasma Materials Science, Japan Society for the Promotion of Science (JSPS)
- Article Type
- Conference
- Citation
- 10th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 23th SPSM (Symposium on Plasma Science for Materials), 2010-07-04
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Related Researcher
- 조무현CHO, MOO HYUN
- Div. of Advanced Nuclear Enginrg