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Non-destructive Analysis of Nanoporous Low-k Thin Films using GISAXS and X-ray Reflectivity
- Title
- Non-destructive Analysis of Nanoporous Low-k Thin Films using GISAXS and X-ray Reflectivity
- Date Issued
- 2010-07-05
- Publisher
- PAL
- Article Type
- Conference
- Citation
- The 5th AOFSRR, 2010-07-05
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry