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Fabrication of a Micro-Pattern Mold Insert with High Aspect Ratio Using X-ray Lithography Technology

Title
Fabrication of a Micro-Pattern Mold Insert with High Aspect Ratio Using X-ray Lithography Technology
Authors
박성진
Date Issued
2016-12-09
Publisher
PAL
URI
https://oasis.postech.ac.kr/handle/2014.oak/48098
Article Type
Conference
Citation
The 28th Synchrotron Radiation User`s Workshop & KOSUA Meeting, 2016-12-09
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박성진PARK, SEONG JIN
Dept of Mechanical Enginrg
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