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Fabrication of deep sub-wavelength 3D metamaterials and metadevices using ultra-high accurate and precise electron beam lithography overlay process
- Title
- Fabrication of deep sub-wavelength 3D metamaterials and metadevices using ultra-high accurate and precise electron beam lithography overlay process
- Date Issued
- 2016-11-29
- Publisher
- Materials Research Society
- Article Type
- Conference
- Citation
- 2016 MRS Fall meeting, 2016-11-29
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Related Researcher
- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg