Full metadata record
DC Field | Value | Language |
dc.contributor.author | 박영배 | en_US |
dc.date.accessioned | 2015-02-24T14:38:29Z | - |
dc.date.available | 2015-02-24T14:38:29Z | - |
dc.date.issued | 1998 | en_US |
dc.identifier.other | OAK-2015-02465 | en_US |
dc.identifier.uri | http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001899618 | en_US |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/4845 | - |
dc.description | Doctor | en_US |
dc.language | kor | en_US |
dc.publisher | 포항공과대학교 | en_US |
dc.rights | BY_NC_ND | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
dc.title | 플라즈마 화학증착에 의한 저온 할로겐화 절연막 증착 및 수소 플라즈마에 의한 계면처리에 대한 연구 | en_US |
dc.title.alternative | A Study on Low Temperature Halogenated Insulator Film Deposition byPlasma Enhanced Chemical Vapor Deposition (PECVD) and Interface Pretreatment by in situ Hydrogen Plasma | en_US |
dc.type | Thesis | en_US |
dc.contributor.college | 일반대학원 화학공학과 | en_US |
dc.date.degree | 1998-02 | en_US |
dc.type.docType | Thesis | - |
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