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Scaling and universal law for high pressure cold plasma breakdown at radiofrequency and microwave
- Title
- Scaling and universal law for high pressure cold plasma breakdown at radiofrequency and microwave
- Date Issued
- 2016-09-28
- Publisher
- The Korean Vacuum Society
- Article Type
- Conference
- Citation
- The 6th International Conference on Microelectronics and Plasma Technology (ICMAP2016), 2016-09-28
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