Fabrication of deep subwavelength 3D metamaterials and metadevices using high-precision multi-step electron-beam lithography system
- Title
- Fabrication of deep subwavelength 3D metamaterials and metadevices using high-precision multi-step electron-beam lithography system
- Authors
- 노준석; 김인기; 윤관호; 김민경; 문정호; 소순애
- Date Issued
- 2016-07-13
- Publisher
- Gordon Research Conferences
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/48939
- Article Type
- Conference
- Citation
- Gordon Research Conferences - Plasmonics and Nanophotonics, 2016-07-13
- Files in This Item:
- There are no files associated with this item.
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