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Fabrication of deep subwavelength 3D metamaterials and metadevices using high-precision multi-step electron-beam lithography system

Title
Fabrication of deep subwavelength 3D metamaterials and metadevices using high-precision multi-step electron-beam lithography system
Authors
노준석김인기윤관호김민경문정호소순애
Date Issued
2016-07-13
Publisher
Gordon Research Conferences
URI
https://oasis.postech.ac.kr/handle/2014.oak/48939
Article Type
Conference
Citation
Gordon Research Conferences - Plasmonics and Nanophotonics, 2016-07-13
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노준석RHO, JUNSUK
Dept of Mechanical Enginrg
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