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Enhancement of Cleaning Efficiency by Geometrical Confinement of Plasma Expansion in the Laser Shock Cleaning Process for Nanoscale Contaminant Removal
- Title
- Enhancement of Cleaning Efficiency by Geometrical Confinement of Plasma Expansion in the Laser Shock Cleaning Process for Nanoscale Contaminant Removal
- Date Issued
- 2009-01-26
- Article Type
- Conference
- Citation
- 2008 SPIE Photonics West, 2009-01-26
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Related Researcher
- 김동식KIM, DONG SIK
- Dept of Mechanical Enginrg