Full metadata record
DC Field | Value | Language |
dc.contributor.author | 이한보람 | - |
dc.contributor.author | 김우희 | - |
dc.contributor.author | 이정원 | - |
dc.contributor.author | 허광 | - |
dc.contributor.author | 황인찬 | - |
dc.contributor.author | 박상준 | - |
dc.contributor.author | 홍승훈 | - |
dc.contributor.author | 김형준 | - |
dc.date.accessioned | 2018-06-15T06:51:27Z | - |
dc.date.available | 2018-06-15T06:51:27Z | - |
dc.date.created | 2009-07-29 | - |
dc.date.issued | 2009-02-20 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/51649 | - |
dc.publisher | 반도체학술대회 | - |
dc.relation.isPartOf | 제16회 반도체 학술대회 | - |
dc.title | Area Selective Atomic Layer Deposition of Cobalt | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 제16회 반도체 학술대회 | - |
dc.citation.conferencePlace | KO | - |
dc.citation.title | 제16회 반도체 학술대회 | - |
dc.contributor.affiliatedAuthor | 이한보람 | - |
dc.contributor.affiliatedAuthor | 김우희 | - |
dc.contributor.affiliatedAuthor | 황인찬 | - |
dc.contributor.affiliatedAuthor | 박상준 | - |
dc.contributor.affiliatedAuthor | 김형준 | - |
dc.description.journalClass | 2 | - |
dc.description.journalClass | 2 | - |
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