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Study on Co Atomic Layer Deposition with Various Reactants and Application to Area Selective Deposition
- Title
- Study on Co Atomic Layer Deposition with Various Reactants and Application to Area Selective Deposition
- Authors
- 이한보람; 김우희; Jeong Won Lee; Kwang Heo; 황인찬; 박상준; Seunghun Hong; 김형준
- Publisher
- International Semiconductor Technology Conference 2009
- Article Type
- Conference
- Citation
- International Semiconductor Technology Conference 2009
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg