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In situ Synchrotron X-ray Scattering Study on The Initial Structure of Ru Metal Atomic Layer Deposition Films for The Electronic Devices
- Title
- In situ Synchrotron X-ray Scattering Study on The Initial Structure of Ru Metal Atomic Layer Deposition Films for The Electronic Devices
- Authors
- 이한보람; Yong Jun Park; 김우희; Dong-Ryeol Lee; 김형준; Shi-Woo Rhee; Sunggi Baik
- Publisher
- Material Research Society 2009 Spring Meeting
- Article Type
- Conference
- Citation
- Material Research Society 2009 Spring Meeting
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg