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Effects of precursor flow rates during LPCVD on the properties of transparent conducting Al doped ZnO thin films
- Title
- Effects of precursor flow rates during LPCVD on the properties of transparent conducting Al doped ZnO thin films
- Publisher
- E-MRS 2009 Spring Meeting
- Article Type
- Conference
- Citation
- E-MRS 2009 Spring Meeting
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Related Researcher
- 김형준KIM, HYUNGJUN
- Dept of Materials Science & Enginrg