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Development of EUV Light Source Using Capillary Z-pinch Discharge System
- Title
- Development of EUV Light Source Using Capillary Z-pinch Discharge System
- Authors
- 조무현
- Date Issued
- 2009-04-23
- Publisher
- 한국물리학회
- Article Type
- Conference
- Citation
- 2009년 봄 학술논문발표회 및 제85회 정기총회, 2009-04-23
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Related Researcher
- 조무현CHO, MOO HYUN
- Div. of Advanced Nuclear Enginrg