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Atomic layer deposition of hafnium silicate nano-films using various precursors
- Title
- Atomic layer deposition of hafnium silicate nano-films using various precursors
- Date Issued
- 2009-06-24
- Publisher
- Ironix Conferences
- Article Type
- Conference
- Citation
- 5th International Conference on Diffusion in Solids and Liquids, 2009-06-24
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg