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미세구조를 조절한 Mo 확산방지막이 TFT-LCD용 Cu배선의 신뢰성에 미치는 영향
- Title
- 미세구조를 조절한 Mo 확산방지막이 TFT-LCD용 Cu배선의 신뢰성에 미치는 영향
- Date Issued
- 2008-04-01
- Publisher
- 대한금속재료학회
- Article Type
- Conference
- Citation
- 대한금속재료학회 춘계학술대회, 2008-04-01
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg