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RTCVD 법에 의한 실리콘 에피막의 성장 및 특성
- Title
- RTCVD 법에 의한 실리콘 에피막의 성장 및 특성
- Authors
- 강봉구
- Date Issued
- 1995-01-01
- Publisher
- 전자공학회
- Article Type
- Conference
- Citation
- 전자공학회 하계학술대회, 1995-01-01
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Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg