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Remote PECVD와 Direct PECVD에 의해 증착된 실리콘 산화막의 특성평가
- Title
- Remote PECVD와 Direct PECVD에 의해 증착된 실리콘 산화막의 특성평가
- Authors
- 강봉구
- Date Issued
- 1991-01-01
- Publisher
- 전자공학회
- Article Type
- Conference
- Citation
- 91 전자공학회 추계 학술대회 논문집, 1991-01-01
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Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg