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Helicon Wave Plasma CVD 법에 의한 c-BN 박막의 합성 및 밀착력 증대
- Title
- Helicon Wave Plasma CVD 법에 의한 c-BN 박막의 합성 및 밀착력 증대
- Authors
- 김경보
- Date Issued
- 2000
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905073
https://oasis.postech.ac.kr/handle/2014.oak/5302
- Article Type
- Thesis
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