Thesis
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이선아 | en_US |
| dc.date.accessioned | 2015-02-24T14:53:37Z | - |
| dc.date.available | 2015-02-24T14:53:37Z | - |
| dc.date.issued | 2000 | en_US |
| dc.identifier.other | OAK-2015-03036 | en_US |
| dc.identifier.uri | http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905187 | en_US |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/5416 | - |
| dc.description | Master | en_US |
| dc.language | kor | en_US |
| dc.publisher | 포항공과대학교 | en_US |
| dc.rights | BY_NC_ND | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
| dc.title | 노광 공정에서 Filtering이 LIGA 구조물에 미치는 영향 | en_US |
| dc.title.alternative | Effect of filtering on LIGA structures in deep X-ray lithography process | en_US |
| dc.type | Thesis | en_US |
| dc.contributor.college | 일반대학원 재료금속공학과 | en_US |
| dc.date.degree | 2000-02 | en_US |
| dc.type.docType | Thesis | - |
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