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Design and fabarication of high sensitivity 2-axis MEMS gyro sensor by frequency matching of driving and sensing motion
- Title
- Design and fabarication of high sensitivity 2-axis MEMS gyro sensor by frequency matching of driving and sensing motion
- Authors
- 임근배
- Date Issued
- 2008-06-01
- Publisher
- NSTI-Nanotech 2008
- Article Type
- Conference
- Citation
- NSTI-Nanotech 2008, 2008-06-01
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg