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Anodic aluminum oxide-based capacitive humidity sensor integrated with micro-heater
- Title
- Anodic aluminum oxide-based capacitive humidity sensor integrated with micro-heater
- Authors
- 박현철
- Date Issued
- 2008-06-04
- Publisher
- NSTI
- Article Type
- Conference
- Citation
- NSTI Nanotech 2008, page. 599 - 602, 2008-06-04
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