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Separated Micromold System (SMS)을 이용한 고종횡비 초소형 구조물의 핫엠보싱 공정

Title
Separated Micromold System (SMS)을 이용한 고종횡비 초소형 구조물의 핫엠보싱 공정
Authors
권태헌
Date Issued
2009-04-02
Publisher
한국 MEMS 학술대회운영위원회
URI
https://oasis.postech.ac.kr/handle/2014.oak/56485
Article Type
Conference
Citation
11th Korean MEMS Conference, 2009-04-02
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권태헌KWON, TAI HUN
Div of Integrative Biosci & Biotech
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