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저온 플라즈마로 합성된 실리콘 나노결정의 광학적 특성에 미치는 질소플라즈마의 영향

Title
저온 플라즈마로 합성된 실리콘 나노결정의 광학적 특성에 미치는 질소플라즈마의 영향
Authors
박찬경
Date Issued
2010-11-25
Publisher
한국현미경학회 추계학술대회
URI
https://oasis.postech.ac.kr/handle/2014.oak/57403
Article Type
Conference
Citation
한국현미경학회 추계학술대회, 2010-11-25
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박찬경PARK, CHAN GYUNG
Dept of Materials Science & Enginrg
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