Full metadata record
DC Field | Value | Language |
dc.contributor.author | 정홍 | - |
dc.contributor.author | 이원석 | - |
dc.contributor.author | 최지희 | - |
dc.date.accessioned | 2018-06-18T00:32:56Z | - |
dc.date.available | 2018-06-18T00:32:56Z | - |
dc.date.created | 2011-03-30 | - |
dc.date.issued | 2010-06-17 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/57601 | - |
dc.publisher | 대한전자공학회 | - |
dc.relation.isPartOf | 2010년도 하계종합학술대회 | - |
dc.relation.isPartOf | 2010년도 하계종합학술대회 | - |
dc.title | SEM 마스크 영상의 Critical Dimension 측정 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 2010년도 하계종합학술대회, pp.102 - 104 | - |
dc.citation.conferencePlace | KO | - |
dc.citation.endPage | 104 | - |
dc.citation.startPage | 102 | - |
dc.citation.title | 2010년도 하계종합학술대회 | - |
dc.contributor.affiliatedAuthor | 정홍 | - |
dc.contributor.affiliatedAuthor | 이원석 | - |
dc.contributor.affiliatedAuthor | 최지희 | - |
dc.description.journalClass | 2 | - |
dc.description.journalClass | 2 | - |
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