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Characterization of the initial ALD growth of TaN using Synchrotron X-ray Reflectivity.
- Title
- Characterization of the initial ALD growth of TaN using Synchrotron X-ray Reflectivity.
- Date Issued
- 2011-02-16
- Publisher
- 한국반도체학회
- Article Type
- Conference
- Citation
- 2011KCS (제18회 한국반도체학술대회), 2011-02-16
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