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In-situ Synchrotron X-ray Measurement of Ru Film Growth by Atomic Layer Deposition
- Title
- In-situ Synchrotron X-ray Measurement of Ru Film Growth by Atomic Layer Deposition
- Date Issued
- 2009-11-05
- Publisher
- Gwangju-Jeonnam Nano Science and Technology Union
- Article Type
- Conference
- Citation
- GJ-NST 2009, 2009-11-05
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