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Prediction Model of Microlens Fabricated by Modified LIGA Process
- Title
- Prediction Model of Microlens Fabricated by Modified LIGA Process
- Date Issued
- 2002-04-23
- Publisher
- Nano Science and Technology Institute
- Article Type
- Conference
- Citation
- The fifth international conference on MSM (Modeling and Simulation of Microsystems) 2002, 2002-04-23
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Related Researcher
- 권태헌KWON, TAI HUN
- Div of Integrative Biosci & Biotech