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One Step Fabrication of Hierarchical Silicon Surfaces and Modification of its Morphology
- Title
- One Step Fabrication of Hierarchical Silicon Surfaces and Modification of its Morphology
- Date Issued
- 2011-09-19
- Publisher
- Micro resist technology GmbH
- Article Type
- Conference
- Citation
- 37th International Conference on Micro and Nano Engineering (MNE 2011), 2011-09-19
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg