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Removal of 10nm contaminant particles from a wafer surface with supersonic CO2 particle beam
- Title
- Removal of 10nm contaminant particles from a wafer surface with supersonic CO2 particle beam
- Date Issued
- 2011-06-15
- Publisher
- Clean tech
- Article Type
- Conference
- Citation
- Nanotech 2011, 2011-06-15
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Related Researcher
- 이진원LEE, JIN WON
- Dept of Mechanical Enginrg